1 The Semiconductor Industry Introduction Birth of an Industry The Solid-State Era Integrated Circuits (ICs) Process and Product Trends Moore’s Law Decreasing Feature Size Increasing Chip and Wafer Size Reduction in Defect Density Increase in Interconnection Levels The Semiconductor Industry Association Roadmap Chip Cost Industry Organization Stages of Manufacturing Six Decades of Advances in Microchip Fabrication Processes The Nano Era Review Topics References 2 Properties of Semiconductor Materials and Chemicals Introduction Atomic Structure The Bohr Atom The Periodic Table of the Elements Electrical Conduction Conductors Dielectrics and Capacitors Resistors Intrinsic Semiconductors Doped Semiconductors Electron and Hole Conduction Carrier Mobility Semiconductor Production Materials Germanium and Silicon Semiconducting Compounds Silicon Germanium Engineered Substrates Ferroelectric Materials Diamond Semiconductors Process Chemicals Molecules， Compounds， and Mixtures Ions States of Matter Solids， Liquids， and Gases Plasma State Properties of Matter Temperature Density， Specic Gravity， and Vapor Density Pressure and Vacuum Acids， Alkalis， and Solvents Acids and Alkalis Solvents Chemical Purity and Cleanliness Safety Issues The Material Safety Data Sheet Review Topics References 3 Crystal Growth and Silicon Wafer Preparation Introduction Semiconductor Silicon Preparation Silicon Wafer Preparation Stages Crystalline Materials Unit Cells Poly and Single Crystals Crystal Orientation Crystal Growth Czochralski Method Liquid-Encapsulated Czochralski Float Zone Crystal and Wafer Quality Point Defects Dislocations Growth Defects Wafer Preparation End Cropping Diameter Grinding Crystal Orientation， Conductivity， and Resistivity Check Grinding Orientation Indicators Wafer Slicing Wafer Marking Rough Polish Chemical Mechanical Polishing Backside Processing Double-Sided Polishing Edge Grinding and Polishing Wafer Evaluation Oxidation …… 4 Overview of Wafer Fabrication and Packaging 5 Contamination Control 6 Productivity and Process Yields 7 Oxidation 8 The Ten-Step Patterning Process―Surface Preparation to Exposure 9 The Ten-Step Patterning Process―Developing to Final Inspection 10 Next Generation Lithography 11 Doping 12 Layer Deposition 13 Metallization 14 Process and Device Evaluation 15 The Business of Wafer Fabrication 16 Introduction to Devices and Integrated Circuit Formation 17 Process and Device Evaluation 18 Packaging Glossary Index
