光电探测技术与应用

本书以编者多年从事光电探测技术及其应用方面的研究为基础，结合编者在光电探测技术领域的最新研究成果，以及参考近年来光电探测技术的最新成果编写而成。本书主要内容包括光电探测技术基础理论、光电探测系统中的常用光源、光电发射器件、光电导探测器件、半导体结型光电器件、光电成像器件、红外探测器件、微纳光学探测器件、典型光电探测系统、光电探测新技术及应用。全书体系完整，概念清晰，力争做到引导读者正确掌握光电探测器件的基本原理、使用技巧和光电探测系统的设计思想与方法。 本书力求为测控技术与仪器、电子科学与技术、光电信息科学与工程、电子信息工程、智能感知工程等专业的本科生，以及仪器科学与技术、光学工程、电子科学与技术、信息与通信工程等专业的研究生和工程技术人员提供光电探测系统分析与设计的基本理论、先进的前沿技术和最新方法。

目 录 第1 章 光电探测技术基础理论 ·····················································································.1 1.1 光电探测系统概述 ·································································································.1 1.2 辐射度学和光度学 ·································································································.1 1.2.1 辐射度学 ····································································································.1 1.2.2 光度学 ·······································································································.3 1.2.3 辐射度学与光度学的基本定律 ·········································································.5 1.2.4 黑体辐射 ····································································································.7 1.3 半导体基础知识 ····································································································.9 1.3.1 半导体结构 ·································································································.9 1.3.2 半导体中的载流子浓度 ·················································································.12 1.4 半导体的光电效应 ································································································.16 1.4.1 光电导效应 ································································································.16 1.4.2 光伏效应 ···································································································.17 1.4.3 光电发射效应 ·····························································································.19 1.5 光热效应 ············································································································.20 1.5.1 热电偶和热电堆 ··························································································.21 1.5.2 热释电探测器件 ··························································································.22 1.6 光电探测器件的噪声和主要特性参数 ········································································.25 1.6.1 光电探测器件的噪声 ····················································································.25 1.6.2 光电探测器件的主要特性参数 ········································································.27 思考与练习 ···············································································································.29 第2 章 光电探测系统中的常用光源 ·············································································.30 2.1 光源的基本特性参数 ·····························································································.30 2.1.1 辐射效率和发光效率 ····················································································.30 2.1.2 光谱功率分布 ·····························································································.31 2.1.3 空间发光强度分布 ·······················································································.31 2.1.4 光源的颜色 ································································································.32 2.1.5 光源的色温 ································································································.32 2.2 热辐射源 ············································································································.33 2.2.1 太阳与黑体模拟器 ·······················································································.33 2.2.2 白炽灯与卤钨灯 ··························································································.34 2.3 气体放电光源 ······································································································.34 2.4 发光二极管 ·········································································································.37 2.4.1 无机材料发光二极管 ····················································································.37 2.4.2 有机材料发光二极管 ····················································································.40 2.5 激光器 ···············································································································.43 2.5.1 激光器的基本原理 ·······················································································.43 2.5.2 激光器的分类及应用 ····················································································.44 2.5.3 激光的特性 ································································································.52 2.6 新型光源 ············································································································.53 2.6.1 ASE 光源 ··································································································.53 2.6.2 超连续谱光源 ·····························································································.54 思考与练习 ···············································································································.55 第3 章 光电发射器件 ··································································································.57 3.1 光电阴极 ············································································································.57 3.1.1 光电阴极的主要特性参数 ··············································································.57 3.1.2 常用光电阴极材料 ·······················································································.59 3.2 光电管与光电倍增管 ·····························································································.61 3.2.1 光电管的结构及原理 ····················································································.61 3.2.2 光电倍增管的结构及原理 ··············································································.61 3.2.3 微通道板光电倍增管的结构及原理 ··································································.63 3.3 光电倍增管的主要特性参数 ····················································································.66 3.4 光电倍增管的供电电路和信号输出电路 ·····································································.70 3.4.1 供电电路 ···································································································.70 3.4.2 信号输出电路 ·····························································································.73 3.5 像增强器 ············································································································.74 3.5.1 第一代像增强器 ··························································································.74 3.5.2 第二代像增强器 ··························································································.75 3.5.3 超二代像增强器 ··························································································.75 3.5.4 第三代及第四代像增强器 ··············································································.75 3.6 光电发射器件的应用 ·····························································································.76 3.6.1 光电倍增管的典型应用 ·················································································.76 3.6.2 像增强器的典型应用 ····················································································.78 思考与练习 ···············································································································.79 第4 章 光电导探测器件 ·······························································································.80 4.1 光电导探测器件的工作原理与结构特点 ·····································································.80 4.1.1 光电导原理 ································································································.80 4.1.2 光电导探测器件的结构特点 ···········································································.82 4.2 光电导探测器件材料及结构特点 ··············································································.83 4.3 光电导探测器件的主要特性参数 ··············································································.85 4.3.1 光电流及光电导增益 ····················································································.85 4.3.2 光电特性 ···································································································.86 4.3.3 光谱特性 ···································································································.88 4.3.4 伏安特性 ···································································································.89 4.3.5 时间响应及频率特性 ····················································································.90 4.3.6 前历效应 ···································································································.92 4.3.7 温度特性 ···································································································.93 4.4 光电导探测器件的转换电路 ····················································································.93 4.4.1 基本偏置电路 ·····························································································.93 4.4.2 恒流偏置电路 ·····························································································.94 4.4.3 恒压偏置电路 ·····························································································.95 4.5 光电导探测器件的应用实例 ····················································································.96 4.5.1 自动调光台灯控制电路 ·················································································.96 4.5.2 声光控制延时电路 ·······················································································.97 4.5.3 火焰探测报警器 ··························································································.98 4.5.4 相机自动曝光控制电路 ·················································································.99 4.5.5 热电制冷型红外测温仪 ···············································································.100 思考与练习 ·············································································································.101 第5 章 半导体结型光电器件 ······················································································.102 5.1 结型光电器件的基本原理 ·····················································································.102 5.1.1 热平衡状态下的PN 结 ···············································································.102 5.1.2 光照下的PN 结 ························································································.102 5.2 硅光电池 ··········································································································.105 5.2.1 硅光电池的基本结构 ··················································································.105 5.2.2 硅光电池的工作原理 ··················································································.106 5.2.3 硅光电池的特性参数 ··················································································.106 5.3 硅光电二极管 ····································································································.109 5.3.1 硅光电二极管的基本结构 ············································································.109 5.3.2 硅光电二极管的工作原理 ············································································.110 5.3.3 硅光电二极管的电流方程 ············································································.110 5.3.4 硅光电二极管的基本特性 ············································································.111 5.4 硅光电三极管 ····································································································.114 5.4.1 硅光电三极管的基本结构 ············································································.114 5.4.2 硅光电三极管的工作原理 ············································································.115 5.4.3 硅光电三极管的基本特性 ············································································.116 5.5 结型光电器件的偏置电路 ·····················································································.119 5.5.1 反向偏置电路 ···························································································.119 5.5.2 零偏置电路 ······························································································.121 5.5.3 其他光电转换电路 ·····················································································.122 5.6 特殊结型光电二极管 ···························································································.124 5.6.1 PIN 结型光电二极管 ··················································································.124 5.6.2 雪崩光电二极管 ························································································.124 5.6.3 半导体色敏探测器件 ··················································································.126 5.7 象限探测器件和位置敏感探测器件 ·········································································.128 5.7.1 象限探测器件 ···························································································.128 5.7.2 位置敏感探测器件 ·····················································································.131 5.8 结型光电器件的特性参数与选用 ············································································.135 5.8.1 结型光电器件的特性参数 ············································································.136 5.8.2 结型光电器件的选用 ··················································································.137 思考与练习 ·············································································································.138 第6 章 光电成像器件 ································································································.140 6.1 真空成像器件 ····································································································.140 6.1.1 像管 ·······································································································.140 6.1.2 摄像管 ····································································································.143 6.2 固体成像器件 ····································································································.145 6.2.1 电荷耦合器件 ···························································································.145 6.2.2 CMOS 图像传感器 ····················································································.153 6.2.3 工业相机简介 ···························································································.158 6.2.4 机器视觉系统的组成及应用 ·········································································.161 6.3 工业相机的应用 ·································································································.169 6.3.1 条纹相机 ·································································································.169 6.3.2 立体相机 ·································································································.175 6.3.3 偏振相机 ·································································································.181 6.3.4 光谱相机 ·································································································.184 思考与练习 ·············································································································.186 第7 章 红外探测器件 ································································································.188 7.1 红外探测器件分类 ······························································································.188 7.1.1 热探测器件 ······························································································.188 7.1.2 光子探测器件 ···························································································.189 7.1.3 红外探测器件的工作条件与性能参数 ·····························································.190 7.2 常用红外探测器件 ······························································································.198 7.2.1 光电导红外探测器件的工作原理与性能分析 ····················································.198 7.2.2 扫积型红外探测器件原理与结构 ···································································.201 7.2.3 光伏红外探测器件的工作原理与性能分析 ·······················································.203 7.2.4 肖特基势垒光电探测器件的工作原理 ·····························································.205 7.2.5 量子阱红外光子探测器件 ············································································.206 7.3 常用热探测器件 ·································································································.207 7.3.1 热敏电阻 ·································································································.208 7.3.2 热释电探测器件 ························································································.211 7.3.3 高莱管 ····································································································.213 7.4 其他红外探测器件 ······························································································.214 7.4.1 锑化铟红外探测器件 ··················································································.214 7.4.2 碲镉汞红外探测器件 ··················································································.215 7.4.3 碲锡铅红外探测器件 ··················································································.215 7.4.4 砷化镓红外探测器件 ··················································································.216 7.4.5 光子牵引探测器件 ·····················································································.217 7.4.6 MOS 探测器件 ·························································································.218 7.5 红外探测器件的原理及应用 ··················································································.218 7.5.1 红外夜视仪的原理及应用 ············································································.218 7.5.2 红外热成像仪的原理及应用 ·········································································.220 7.5.3 红外制导系统的原理及应用 ·········································································.221 思考与练习 ·············································································································.221 第8 章 微纳光学探测器件 ·························································································.222 8.1 光学微腔型探测器件 ···························································································.222 8.1.1 法布里-珀罗型微腔 ····················································································.224 8.1.2 回音壁型微腔 ···························································································.226 8.1.3 光子晶体型微腔 ························································································.227 8.1.4 光学微腔在光学探测中的应用 ······································································.227 8.1.5 光学微腔在激光器和传感器中的应用 ·····························································.229 8.2 二维微纳光学探测器件 ························································································.232 8.2.1 二维肖特基结型光学探测器件 ······································································.232 8.2.2 二维光电二极管 ························································································.234 8.2.3 二维光电三极管 ························································································.236 8.3 表面等离激元微纳光学探测器件 ············································································.238 8.3.1 表面等离激元光场调控 ···············································································.238 8.3.2 亚波长微纳结构等离激元器件 ······································································.240 8.3.3 表面等离激元增强型光学探测器件 ································································.241 8.3.4 表面等离激元在纳米激光器和传感器中的应用 ·················································.243 8.4 柔性微纳光学探测器件 ························································································.247 8.4.1 基于传统无机半导体材料的柔性微纳光学探测器件 ···········································.247 8.4.2 基于新型柔性材料的柔性微纳光学探测器件 ····················································.248 8.4.3 柔性微纳光学探测器件在仿生方面的应用 ·······················································.250 8.4.4 柔性微纳光学探测器件在传感和显示方面的应用 ··············································.252 思考与练习 ·············································································································.254 第9 章 典型光电探测系统 ·························································································.255 9.1 瞬态表面高温光电探测系统和校准系统 ···································································.255 9.1.1 瞬态表面高温光电探测系统 ·········································································.255 9.1.2 瞬态表面温度传感器可溯源校准系统 ·····························································.265 9.1.3 瞬态高温测量的外推方法 ············································································.274 9.2 激光光幕靶光电探测系统及校准 ············································································.275 9.2.1 整体框架型激光光幕靶 ···············································································.276 9.2.2 分离型激光光幕靶 ·····················································································.279 9.2.3 激光光幕靶的校准 ·····················································································.286 9.2.4 激光光幕靶的应用拓展 ···············································································.287 9.3 原子发射双谱线光电测温系统 ···············································································.290 9.3.1 原子发射双谱线光电测温原理 ······································································.290 9.3.2 原子发射双谱线光电测温技术 ······································································.290 9.4 吸收光谱技术 ····································································································.293 9.4.1 红外吸收光谱检测技术 ···············································································.293 9.4.2 可调谐半导体激光吸收光谱技术 ···································································.296 9.4.3 光声光谱技术 ···························································································.301 9.5 其他光电探测系统 ······························································································.305 9.5.1 归一化植被指数光电探测系统 ······································································.305 9.5.2 光纤传像元件光学特性光电探测系统 ·····························································.309 9.5.3 基于位置传感器的自动步枪的自动机运动参数光电探测系统 ·······························.312 9.5.4 导弹轨上运动参数光电探测系统 ···································································.314 9.5.5 纯镁或镁合金燃点比色测温系统 ···································································.315 思考与练习 ·············································································································.317 第10 章 光电探测新技术及应用 ················································································.319 10.1 激光散斑测量技术及应用 ···················································································.319 10.1.1 散斑的数学描述 ······················································································.320 10.1.2 激光散斑测量方法 ···················································································.320 10.2 太赫兹技术及应用 ····························································································.323 10.2.1 太赫兹波及特点 ······················································································.323 10.2.2 太赫兹波成像技术的应用 ··········································································.325 思考与练习 ·············································································································.331 参考文献 ······················································································································.332