Chapter 1 Project Overview
1.1 Project Introduction
1.1.1 Overall Scientific Objectives
1.1.2 Core Scientific Issues
1.2 Project Layout
1.2.1 Project Deployment
1.2.2 Project Integration and Sublimation
1.2.3 Interdisciplinary and Integration
1.3 Research Significance
Chapter 2 Research Situation
2.1 Research Status of Nanomanufacturing
2.2 National Strategic Demand and Development Trend of Nanometer Manufacturing
2.3 Development Trend of Nanomanufacturing in China
2.3.1 Development Trend of Research on Nanomanufacturing in China
2.3.2 Development Trend of Key Technologies of Nanomanufacturing in China
2.3.3 Promotion of the Project to Nanomanufacturing in China
Chapter 3 Nano/Sub-Nanometer Precision Manufacturing
3.1 Theoretical Model and Method of Atomic Layer Material Removal
3.2 Important Engineering Application of Nanometer Precision Manufacturing
3.3 Process Equipment for Nanometer Precision Manufacturing
Chapter 4 Consistent Manufacturing of Macro, Micro and Nano Cross-Scale Structures
4.1 Principle and Method of Electric Field Driven Nanoimprint
4.1.1 Near-Zero Pressure Filling Principle of Electric Field Regulation at Liquid-Solid Interface
4.1.2 Micro-Shape-Control Method for Multi-Physical Field Cooperative Control
4.1.3 Forming Control Mechanism Driven by Electric Field of Micro-Nano Structure
4.2 Principles and Methods of Electrochemical Nanoimprinting of Semiconductor Materials
4.2.1 Principle and Method of Electrochemical Corrosion Induced by Contact Potential
4.2.2 Principle and Method of Cooperative Modulation of Electric Field, Light Field and Force Field for Electrochemical Imprinting
4.3 Imprinting Manufacturing Equipment for Large-Format Nanoscale Structures
4.3.1 Roll-to-Roll Continuous Roll Imprint Equipment
4.3.2 Wafer-Level Gas-Electricity Cooperative Nanoimprint Equipment
4.4 Engineering Applications of Functionalized Large Area Nanostructures
4.4.1 Ultra-Long Metrological Grating and Its Engineering Application
4.4.2 Special-Shaped Micro-Nano Structure and Its Engineering Application
4.4.3 Ultra-Thin Light Guide Plate and Its Engineering Application
4.4.4 Flexible Transparent Conductive Film and Its Engineering Application
Chapter 5 Cross-Scale Integrated Manufacturing of Nanostructures and Devices
5.1 High Precision Controllable Manufacturing of Self-Constrained Nanomachining
5.2 Manufacturing of Three-Dimensional Micro-Nano Structure Induced by External Field
5.3 On-Demand Regional Architecture of Functional Nanostructures
5.4 Controlled Machining Method of Two-Dimensional Material Nanostructures
5.5 Important Engineering Applications of Cross-Scale Manufacturing
Chapter 6 New Methods of Laser Micro-Nanomanufacturing
6.1 New Principle and Method of Ultra-Fast Laser Space-Time Shaping Micro-Nano Machining
6.2 Multi-Time Scale Observation of Ultra-Fast Laser Micro-Nanomanufacturing Process
6.3 Important Engineering Applications of Laser Micro-Nanomanufacturing
6.3.1 Machining and Testing of Target Ball Micro-Hole
6.3.2 Manufacturing of New Optical Fiber Sensors
6.3.3 Optical Device Manufacturing
6.3.4 Preparation of New Materials
